Authors
H. L. Hsieh, J. Y. Lee, W. T. Wu, J. C. Chen, Regis Deturche, Gilles Lerondel,
Title
Quasi common optical path heterodyne grating interferometer for displacement measurement
In
Measurement science & technology
Volume
21
Issue
11
Pages
115304–115313
Year
2010
Indexed by
Affiliations
Offprint