Authors
J.-Y. Lee, Hung Lin Hsieh, Gilles Lerondel, Régis Deturche, M.-P. Lu, J.-C. Chen,
Title
Heterodyne grating interferometer based on a quasi-common-optical-path configuration for a two-degrees-of-freedom straightness measurement
In
Applied optics
Volume
50
Issue
9
Pages
1272–1279
Year
2011
Indexed by
Affiliations
Offprint