Authors
Marco Faustini, Glenna L. Drisko, Alban A. Letailleur, Rafael Salas-Montiel, Cédric Boissière, Andrea Cattoni, Anne Marie Haghiri-Gosnet, Gilles Lerondel, David Grosso,
Title
Self-assembled titanium calcium oxide nanopatterns as versatile reactive nanomasks for dry etching lithographic transfer with high selectivity
In
Nanoscale
Volume
5
Issue
3
Pages
984–990
Publisher
Royal Society of Chemistry
Year
2013
Indexed by
Affiliations
Offprint