Hydrogen Fluoride (HF) Substance Flow Analysis for Safe and Sustainable Chemical
Environmental Science and Pollution Research
In this study, the chemical substance flow of hydrogen fluoride (hydrofluoric acid, HF) in domestic chemical industries in 2014 was analyzed in order to provide a basic material and information for the establishment of organized management system to ensure safety during HF applications. A total of 44,751 tons of HF was made by four domestic companies (in 2014); import amount was 95,984 tons, of which 55,491 tons was imported for the manufacturing of semiconductors. The export amount of HF was 2,180 tons, of which 2,074 ton was exported for the manufacturing of semiconductors. Based on the export and import amounts, it can be inferred that HF was used for manufacturing semiconductors. The industries applications of 161,123 tons of HF were as follows: manufacturing of basic inorganic chemical substance (27,937 tons); manufacturing of other chemical products such as detergents (28,208 tons); manufacturing of flat display (24,896 tons); and manufacturing of glass container package (24,002 tons). In this study, an analysis of the chemical substance flow showed that HF was mainly used in the semiconductor industry as well as glass container manufacturing. Combined with other risk management tools and approaches in the chemical industry, the chemical flow analysis (CFA) can be a useful tool and method for assessment and management. The current CFA results provide useful information for policy making in the chemical industry and national systems.