Authors
Imane Bouabibsa, Salim Lamri, Frédéric Sanchette,
Title
Properties of Ti and Al co-doped diamond-like carbon coating deposited by hybrid process RF PECVD/PVD
Volume
15th International Conference on Plasma Surface Engineering Garmisch-Partenkirchen, Germany, September 2016
Year
2016
Indexed by
Affiliations
Offprint