Authors
Caroline Prodhon, Demetrio Macias, Farouk Yalaoui, Alexandre Vial, Lionel Amodeo,
Title
Evolutionary Optimization for Plasmon-Assisted Lithography
In
EvoWorkshops (Lecture Notes in Computer Science)
Pages
420–425
Publisher
Springer
Year
2009
Publisher's URL
http://dx.doi.org/10.1007/978-3-642-01129-0_47
Indexed by
Affiliations
Offprint