Authors
Viscomi, FN; Dey, RK; Caputo, R; Cui, B,
Title
Enhanced adhesion of electron beam resist by grafted monolayer poly(methylmethacrylate-co-methacrylic acid) brush
In
Journal of Vaccum Science and Technology B
Volume
33
Issue
6
Pages
Article N° 06FD06
Publisher
AIP
Year
2015
Indexed by
Affiliations
Offprint