Authors
D Barat, V Bardinal, Ihab Dika, O Soppera, A Rumyantseva, B Reig, M Renault, Aurelien Bruyant, JB Doucet, T Camps, JP Malval, E Daran,
Title
Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization
In
Microelectronic Engineering
Volume
111
Pages
204–209
Publisher
Elsevier
Year
2013
Indexed by
Abstract
We report on the improvement of a fabrication method for micro-optics integration on vertical semiconductor laser diodes (VCSELs). Our approach is based on microlens self-writing by the laser beam itself thanks to self-guided Near-Infra-Red photo-polymerization. Fabrication conditions have been optimized to control and take benefit of process sensitivity to oxygen quenching and to make possible the study of photo-chemical parameters influence on final tip geometry. The interest of this simple method for fabricating focused- ...
Affiliations
Offprint