Authors
P. Briois, D. Mercs, V. Demange, O. Banakh, F. Sanchette, A. Billard,
Title
Characterizations of CrN/a-CNx nanolayered coatings deposited by DC reactive magnetron sputtering of Cr and graphite targets
In
Vacuum
Volume
86
Issue
2
Pages
206–209
Publisher
Elsevier
Year
2011
Indexed by
Abstract
CrN/a-CNx nanolayered coatings have been deposited by DC reactive magnetron sputtering of pure Cr and graphite targets. The total thickness is 1 mm and that of a-CNx layers is kept constant at 3.5 nm. The period (bilayer thickness) is in the range 8e16 nm. CrN and a-CNx layers are crystalline and amorphous respectively. The decrease of CrN layers’ thickness (decrease of period) in the stack leads to refinement of CrN microstructure associated with (200) preferred orientation. The hardness of nanolayered films is independent of the period’s thickness, while internal compressive stress, which remains between that of each elementary layer, follows an evolution close to that of the law of mixtures. The best tribological behaviours are reached for a periods’ thickness of 8 nm.
Affiliations
Offprint