Authors
Pierre Coddet, Frederic Sanchette, Jean-Claude Rousset, Olivier Rapaud, Christian Coddet,
Title
On the elastic modulus and hardness of co-sputtered Zr–Cu–(N) thin metal glass films
In
Surface and Coatings Technology
Volume
206
Issue
17
Pages
3567–3571
Publisher
Elsevier
Year
2012
Indexed by
Abstract
This work focuses on the properties of Zr–Cu–(N) deposits obtained by magnetron co-sputtering of Zr and Cu targets in pure argon or in argon nitrogen gas mixtures. Microstructure and mechanical properties (hardness and Young's modulus) were investigated versus deposition parameters. The composition of the Zr–Cu alloy films on the full binary range was accurately controlled by means of the discharge current intensity on both Zr and Cu targets. Deposits were observed to be amorphous single phased in a large range of copper content, the hardness and Young's modulus of the amorphous phase increasing with the latter. A small amount of nitrogen in the gas mixture leads to higher hardness and Young's modulus values.
Affiliations
Offprint