Authors
Mohamad Arab Pour Yazdi, Fernando Lomello, Jan Wang, Frederic Sanchette, Zushian Dong, Tom White, Yves Wouters, Frederic Schuster, Alain Billard,
Title
Properties of TiSiN coatings deposited by hybrid HiPIMS and pulsed-DC magnetron co-sputtering
In
Vacuum
Volume
109
Pages
43–51
Publisher
Elsevier
Year
2014
Indexed by
Abstract
TiSiN nanocomposites coatings were synthesized for the first time by a hybrid deposition technique where high power impulse (HiPIMS) and pulsed-DC (PDCMS) magnetron co-sputtering were used for Ti and Si deposition respectively in an Ar þ N2 atmosphere. For the Ti target, the deposition parameters were fixed, while the current applied to the Si target ranged from 0 to 0.9 A. Thus, the Si content in the films was adjusted from 0 to 8.8 at.% Si to allows tailoring of microstructure and mechanical properties. TiSiN grain sizes decreased from ~41 to ~6 nm as the coatings became more siliceous. The hardness increased from 20 ± 0.41 to 41.31 ± 2.93 GPa when the Si concentration rose from 0 to 4.4 at.% Si, but beyond this last value, hardness degrades reaching 36.1 ± 2.21 GPa at 8.8 at.% Si. The wear behaviours evaluated by ball-on-disc tests were correlated with the Hardness/Young's modulus ratio. Moreover, the silicon enhanced the oxidation resistance and the least hardness deterioration was found in the sample with the higher silicon content (8.8 at.% Si) after a thermal annealing in air (2 h/700 C).
Affiliations
Offprint