Authors
Caroline Prodhon, Demetrio Macias Guzman, Farouk Yalaoui, Alexandre Vial, Lionel Amodeo,
Title
Evolutionary optimization for Plasmon-assisted lithography
In
International Conference on Evolutionay Computation - Lecture Notes in Computer Sciences, Tubingen, April 2009
Pages
10
Publisher
Springer
Year
2009
Indexed by
Affiliations
Offprint