Authors
David Barat, Veronique Bardinal, I Dika, Olivier Soppera, P Debernardi, Anna Rumyantseva, B Reig, Mikael Renault, T Camps, Aurelien Bruyant, JB Doucet, JP Malval, E Daran,
Title
Photo-chemical study and optical properties of microtips self-written on vertical laser diodes using NIR photo-polymerization
In
Optics express
Volume
20
Issue
20
Pages
22922–22933
Publisher
Optical Society of America
Year
2012
Indexed by
Abstract
Near infra-red (NIR) self-guided photo-polymerization is investigated in the context of micro-optics photo-fabrication on VCSELs (Vertical-Cavity Surface Emitting Lasers). We present the optimized process we have developed to allow for a collective fabrication on III-V devices wafers under real-time optical monitoring. The influence of photo-chemical parameters on final micro-elements dimensions is studied for two types of single mode 760nm VCSELs. The difference of the resulting tip shape between the two lasers is due to ...
Affiliations
Offprint