Authors
Yuchen Zhao, Carl Labergère, Benoit Panicaud, Jean Grosseau-Poussard, Pascal Goudeau,
Title
Modeling of stress and strain fields induced during the Smart-Cut process on silicon. Influence of different couplings for diffusion of hydrogen at a microscopic scale
In
Advanced Materials research
Volume
996
Pages
707–712
Publisher
Materials science and engineering
Year
2014
Indexed by
Affiliations
Offprint