Surface and Coatings Technology Volume 224, 15 June 2013, Pages 77–81 Cover image Influence of bias voltage on properties of AlCrN coatings prepared by cathodic arc deposition
Surface and Coatings Technology Volume
AlCrN coatings were prepared by vacuum cathodic arc deposition. This low-temperature technique has been chosen due to its versatility, allowing the industrial up-scaling. In this study, the attention was focused on the correlation of the bias voltage with the resulting mechanical–tribological properties. For this purpose, the bias voltage was varied from 0 to − 150 V. Indeed, the variation of grain sizes from 24 to 16 nm as well as the residual stresses from − 0.68 to − 8.94 GPa lead to obtain different mechanical–tribological properties. In this context, the sample deposited at − 100 V exhibited an enhanced hardness (50 ± 2 GPa) and an acceptable wear resistance.